Metal nanocrystal memory with sol–gel derived HfO2 high-κ...

Thin Solid Films 2011 Vol. 519; Iss. 16

Metal nanocrystal memory with sol–gel derived HfO2 high-κ tunnel oxide

Ching-Chich Leu, Shih-Tang Chen, Fu-Ken Liu
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Volume:
519
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.02.086
File:
PDF, 1.13 MB
english, 2011
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