Effect of the dielectric–substrate interface on charge accumulation from vacuum ultraviolet irradiation of low-k porous organosilicate dielectrics
H. Sinha, A. Sehgal, H. Ren, M.T. Nichols, M. Tomoyasu, N.M. Russell, Y. Nishi, J.L. ShohetVolume:
519
Year:
2011
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2011.03.010
File:
PDF, 432 KB
english, 2011