Characterization of defects in hydrogenated amorphous silicon deposited on different substrates by capacitance techniques
R. Darwich, P. Roca i CabarrocasVolume:
519
Year:
2011
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2011.03.019
File:
PDF, 1.32 MB
english, 2011