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ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - A Phase Change Memory Device Fabrication Technology Using Si
Li, Ying, Wan, Xudong, Song, Zhitang, Xie, Joseph, Chenc, Bomy, Liu, Bo, Wu, Guanping, Zhu, Nanfei, Zhong, Min, Xu, Jia, Chen, YifengYear:
2011
Language:
english
DOI:
10.1149/1.3567714
File:
PDF, 407 KB
english, 2011