High-rate deposition and mechanical properties of SiOx film...

High-rate deposition and mechanical properties of SiOx film at low temperature by plasma enhanced chemical vapor deposition with the dual frequencies ultra high frequency and high frequency

Su B. Jin, Joon S. Lee, Yoon S. Choi, In S. Choi, Jeon G. Han
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Volume:
519
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.04.022
File:
PDF, 802 KB
english, 2011
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