Investigation on etch characteristics of MgO thin films...

Investigation on etch characteristics of MgO thin films using a HBr/Ar plasma

Eun Ho Kim, Yu Bin Xiao, Seon Mi Kong, Chee Won Chung
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Volume:
519
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2011.04.057
File:
PDF, 693 KB
english, 2011
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