Investigation on etch characteristics of MgO thin films using a HBr/Ar plasma
Eun Ho Kim, Yu Bin Xiao, Seon Mi Kong, Chee Won ChungVolume:
519
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2011.04.057
File:
PDF, 693 KB
english, 2011