Effect of pulse duration on characteristics of modulated...

Thin Solid Films 2011 Vol. 519; Iss. 20

Effect of pulse duration on characteristics of modulated radio-frequency SiH4/N2/NH3 discharges

Xiang-Mei Liu, Yan Wang, Yuan-Hong Song, You-Nian Wang
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
519
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2011.04.073
File:
PDF, 432 KB
english, 2011
Conversion to is in progress
Conversion to is failed