Adhesion property of SiOx-doped Diamond-like Carbon Films Deposited on Polycarbonate by Inductively Coupled Plasma Chemical Vapor Deposition
Sang-min Baek, Tatsuru Shirafuji, Nagahiro Saito, Osamu TakaiVolume:
519
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.04.080
File:
PDF, 554 KB
english, 2011