Electrical mechanism analysis of Al2O3 doped zinc oxide...

Thin Solid Films 2011 Vol. 519; Iss. 20

Electrical mechanism analysis of Al2O3 doped zinc oxide thin films deposited by rotating cylindrical DC magnetron sputtering

Hyeongsik Park, Kyungsoo Jang, Krishna Kumar, Shihyun Ahn, Jaehyun Cho, Juyeon Jang, Kyungjun Ahn, Jeonghoon Yeom, Dongseok Kim, Junsin Yi
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Volume:
519
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2011.04.084
File:
PDF, 721 KB
english, 2011
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