In Situ Measurement of Stress during Deposition of Boron...

Materials Science Forum 2000 Vol. 347-349

In Situ Measurement of Stress during Deposition of Boron Nitride Films

Fukarek, W., Fitz, C., Kolitsch, A., Möller, W.
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Volume:
347-349
Year:
2000
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.347-349.156
File:
PDF, 419 KB
2000
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