Analysis of Electro-Statically Driven...

Analysis of Electro-Statically Driven Micro-Electro-Mechanical Systems

Cho, Chong Du, Lee, Byung Ha
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Volume:
306-308
Year:
2006
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.306-308.1247
File:
PDF, 6.84 MB
english, 2006
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