Analysis of Electro-Statically Driven Micro-Electro-Mechanical Systems
Cho, Chong Du, Lee, Byung HaVolume:
306-308
Year:
2006
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.306-308.1247
File:
PDF, 6.84 MB
english, 2006