Photoluminescence Mapping of a SiC Wafer in Device...

Materials Science Forum 2004 Vol. 457-460

Photoluminescence Mapping of a SiC Wafer in Device Processing

Tajima, Michio, Sugahara, T., Hoshino, Norihiro, Tanimoto, Satoshi, Takahashi, Tetsuo, Nakashima, Shinichi, Yamamoto, T.
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Volume:
457-460
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.457-460.569
File:
PDF, 1021 KB
english, 2004
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