Uniform Axial Charge Carrier Concentration in PVT-Grown p-Type 6H SiC by Non-Uniform Distribution of Boron in the Powder Source
Herro, Z.G., Bickermann, Matthias, Epelbaum, Boris M., Weingärtner, Roland, Künecke, Ulrike, Winnacker, AlbrechtVolume:
457-460
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.457-460.719
File:
PDF, 771 KB
english, 2004