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Effect of Film Thickness and Annealing Temperature in Stress-Induced Damage in Metal Films
Joo, Young Chang, Hwang, Soo JungVolume:
539-543
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.539-543.3520
File:
PDF, 966 KB
english, 2007