Two-Branch Boron Diffusion from Gas Phase in n-Type 4H-SiC

Materials Science Forum 2009 Vol. 615-617

Two-Branch Boron Diffusion from Gas Phase in n-Type 4H-SiC

Bolotnikov, A.V., Muzykov, P.G., Agarwal, Anant, Zhang, Qing Chun, Sudarshan, Tangali S.
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Volume:
615-617
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.615-617.453
File:
PDF, 502 KB
english, 2009
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