Post CMP Cleaning Using a Novel HF Compatible High Power...

Solid State Phenomena 1999 Vol. 65-66

Post CMP Cleaning Using a Novel HF Compatible High Power Magasonic Tank

Tardif, F., Lardin, T., Constant, I., Fayolle, M., Boelen, Pieter, Cowache, C., Kashkoush, Ismail, Novak, R.
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Volume:
65-66
Year:
1999
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.65-66.169
File:
PDF, 350 KB
1999
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