Investigation of Structural Stability in 4H-SiC Structures...

Materials Science Forum 2006 Vol. 527-529

Investigation of Structural Stability in 4H-SiC Structures with Heavy Ion Implanted Interface

Galeckas, Augustinas, Hallén, Anders, Schöner, Adolf, Linnros, Jan, Pirouz, P.
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Volume:
527-529
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.527-529.395
File:
PDF, 1015 KB
english, 2006
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