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A femtogram resolution mass sensor platform, based on SOI electrostatically driven resonant cantilever. Part I: Electromechanical model and parameter extraction
J. Teva, G. Abadal, F. Torres, J. Verd, F. Pérez-Murano, N. BarniolVolume:
106
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.ultramic.2005.12.016
File:
PDF, 593 KB
english, 2006