![](/img/cover-not-exists.png)
Finite Element Analysis and Design of Monolithic Multilayer Piezoelectric Micromanipulator
Chu, Xiang Cheng, Huang, Jin Ding, Li, Long Tu, Gui, Zhi LunVolume:
368-372
Year:
2008
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.368-372.218
File:
PDF, 413 KB
english, 2008