Radial Wafer-to-Wafer Uniformity of Plasma-Deposited Si-N...

Radial Wafer-to-Wafer Uniformity of Plasma-Deposited Si-N Films

Egitto, Frank D.
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Volume:
127
Year:
1980
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2129898
File:
PDF, 572 KB
english, 1980
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