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High-resolution scanning near-field EBIC microscopy: Application to the characterisation of a shallow ion implanted p+–n silicon junction
K. Smaali, J. Fauré, A. El Hdiy, M. TroyonVolume:
108
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.ultramic.2007.10.009
File:
PDF, 1.10 MB
english, 2008