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Observation of three-dimensional elemental distributions of a Si device using a 360°-tilt FIB and the cold field-emission STEM system
Toshie Yaguchi, Mitsuru Konno, Takeo Kamino, Masashi WatanabeVolume:
108
Year:
2008
Language:
english
Pages:
13
DOI:
10.1016/j.ultramic.2008.06.003
File:
PDF, 3.65 MB
english, 2008