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Three-dimensional atom mapping of boron in implanted silicon
O. Cojocaru-Mirédin, E. Cadel, B. Deconihout, D. Mangelinck, D. BlavetteVolume:
109
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.ultramic.2008.09.008
File:
PDF, 677 KB
english, 2009