Failure mechanisms of silicon-based atom-probe tips

Failure mechanisms of silicon-based atom-probe tips

S. Kölling, W. Vandervorst
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Volume:
109
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.ultramic.2008.11.013
File:
PDF, 1.16 MB
english, 2009
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