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Field-induced cathodic oxidation of low-energy Ar-ion-bombarded silicon by AFM
Hyunsook Kim, Sung-Kyoung Kim, Kye-Ryung Kim, Haiwon LeeVolume:
109
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.ultramic.2009.03.017
File:
PDF, 392 KB
english, 2009