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Fast three-dimensional nanoscale metrology in dual-beam FIB–SEM instrumentation
Luca Repetto, Renato Buzio, Carlo Denurchis, Giuseppe Firpo, Emanuele Piano, Ugo ValbusaVolume:
109
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.ultramic.2009.06.009
File:
PDF, 495 KB
english, 2009