MEMS-based fast scanning probe microscopes

Ultramicroscopy 2010 Vol. 110; Iss. 6

MEMS-based fast scanning probe microscopes

F.C. Tabak, E.C.M. Disseldorp, G.H. Wortel, A.J. Katan, M.B.S. Hesselberth, T.H. Oosterkamp, J.W.M. Frenken, W.M. van Spengen
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Volume:
110
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.ultramic.2010.02.018
File:
PDF, 880 KB
english, 2010
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