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Life Time Predictions through X-Ray Defect Analysis of MEMS Devices
Neels, Antonia, Niedermann, Philippe, Dommann, AlexVolume:
584-586
Year:
2008
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.584-586.518
File:
PDF, 1.55 MB
english, 2008