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Atomically Controlled Technology for Future Si-Based Devices
Murota, Junichi, Sakuraba, Masao, Tillack, BerndVolume:
95-96
Year:
2004
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.95-96.607
File:
PDF, 1.33 MB
english, 2004