Oxygen Gas-Timing Control for Variety Properties of Sputtered-ZnO
Limwichean, K., Porntheeraphat, S., Bunjongpru, W., Panprom, P., Pankiew, A., Hruanun, C., Poyai, A., Nukeaw, J.Volume:
93-94
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.93-94.541
Date:
January, 2010
File:
PDF, 1.58 MB
english, 2010