Characterization of Ta and TaN diffusion barriers beneath...

Characterization of Ta and TaN diffusion barriers beneath Cu layers using picosecond ultrasonics

Juerg Bryner, Dieter M. Profunser, Jacqueline Vollmann, Elisabeth Mueller, Juerg Dual
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Volume:
44
Year:
2006
Language:
english
Pages:
1
DOI:
10.1016/j.ultras.2006.05.097
File:
PDF, 470 KB
english, 2006
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