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Thermal conductivity of titanium nitride/titanium aluminum nitride multilayer coatings deposited by lateral rotating cathode arc
Samani, M.K., Ding, X.Z., Khosravian, N., Amin-Ahmadi, B., Yi, Yang, Chen, G., Neyts, E.C., Bogaerts, A., Tay, B.K.Volume:
578
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.02.032
Date:
March, 2015
File:
PDF, 1.18 MB
english, 2015