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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Monolithic integration of micro magnetic pillar array with anisotropic magneto-resistive (AMR) structure for out-of-plane magnetic field detection
Lai, Wei-Ming, Hsu, Fu-Ming, Sung, Wei-Lun, Chen, Rongshun, Fang, WeileunYear:
2015
Language:
english
DOI:
10.1109/memsys.2015.7051105
File:
PDF, 1.14 MB
english, 2015