Improved Performance of Double Zr–Si Layer for Copper...

Electrochemical and Solid-State Letters 2010 Vol. 13; Iss. 4

Improved Performance of Double Zr–Si Layer for Copper Metallization

Wang, Ying, Cao, Fei, Zhang, Mi-lin, Shao, Lei, Li, Xi-chuan
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3294830
File:
PDF, 501 KB
english, 2010
Conversion to is in progress
Conversion to is failed