Non-Axisymmetric Flow Fields in Axisymmetric CVD Reactor Setups Revisited: Influence on the Film's Non-Uniformity
Koronaki, E. D., Cheimarios, N., Laux, H., Boudouvis, A. G.Volume:
3
Language:
english
Journal:
ECS Solid State Letters
DOI:
10.1149/2.002404ssl
Date:
February, 2014
File:
PDF, 2.77 MB
english, 2014