(Invited) Three-Dimensional Epitaxial Si1-XGex, Ge and SiC...

ECS Transactions 2014 / 08 Vol. 64; Iss. 6

(Invited) Three-Dimensional Epitaxial Si1-XGex, Ge and SiC Crystals on Deeply Patterned Si Substrates

von Kanel, H., Isa, F., Falub, C. V., Barthazy, E. J., Muller Gubler, E., Chrastina, D., Isella, G., Kreiliger, T., Taboada, A. G., Meduna, M., Kaufmann, R., Neels, A., Dommann, A., Niedermann, P., Ma
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Volume:
64
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/06406.0631ecst
Date:
August, 2014
File:
PDF, 2.83 MB
english, 2014
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