Growth and Characterization of AlBN Polycrystalline Thin...

Key Engineering Materials 2006 Vol. 301

Growth and Characterization of AlBN Polycrystalline Thin Film by Radio-Frequency Plasma-Assisted Molecular Beam Epitaxy

Yamashita, Masashi, Ishikawa, Yukari, Ohsato, Hitoshi, Shibata, Noriyoshi
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Volume:
301
Year:
2006
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.301.95
File:
PDF, 1.07 MB
english, 2006
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