[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Direct Bonding of Oxidized Cavity Wafers
Palokangas, Martti O., Dekker, James, Henttinen, Kimmo, Mäkinen, JariVolume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2982900
File:
PDF, 903 KB
english, 2008