Electrothermal Characteristics of Electroplated Ni-Based Tunable MEMS Inductor on High-Resistivity Substrate With Displacement Actuator
Bhattacharya, Anirban, Bhattacharyya, Tarun KantiVolume:
6
Year:
2015
Language:
english
Journal:
IEEE Magnetics Letters
DOI:
10.1109/LMAG.2015.2412631
File:
PDF, 454 KB
english, 2015