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[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - All-Wet Strip Approaches for Post-Etch Photoresist Layers After Low-K Patterning
Claes, Martine, Le, QuocToan, Kesters, Els, Lux, Marcel, Urionabarrenetxea, Ariana, Vereecke, Guy, Mertens, P., Carleer, R., Adriaensens, P.Volume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2779377
File:
PDF, 725 KB
english, 2007