A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries
Luo, Ming, Yan, Heng-Chao, Hu, Bin, Zhou, Jun-Hong, Pang, Chee KhiangVolume:
85
Language:
english
Journal:
Computers & Industrial Engineering
DOI:
10.1016/j.cie.2015.04.008
Date:
July, 2015
File:
PDF, 2.80 MB
english, 2015