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Corrosion Inhibiting Effect on Copper Chemical Mechanical Planarization (CMP) in Fe(NO3)3 Based Slurries
Guo, Dong Ming, Li, X.J., Jin, Zhu Ji, Kang, Ren KeVolume:
291-292
Year:
2005
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.291-292.395
File:
PDF, 403 KB
english, 2005