Structural and electrical analysis of the atomic layer...

  • Main
  • Structural and electrical analysis of...

Structural and electrical analysis of the atomic layer deposition of HfO[sub 2]/n-In[sub 0.53]Ga[sub 0.47]As capacitors with and without an Al[sub 2]O[sub 3] interface control layer

A. O’mahony, S. Monaghan, G. Provenzano, I. M. Povey, M. G. Nolan, E. O’connor, K. Cherkaoui, S. B. Newcomb, F. Crupi, P. K. Hurley, M. E. Pemble
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2010
Language:
english
DOI:
10.1063/1.3473773
File:
PDF, 731 KB
english, 2010
Conversion to is in progress
Conversion to is failed