The growth of indium-tin-oxide thin films on glass substrates using DC reactive magnetron sputtering
Ho-Chul Lee, Ji-Yoon Seo, Yong-Won Choi, Dong-Wook LeeVolume:
72
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/j.vacuum.2003.08.001
File:
PDF, 1.12 MB
english, 2003