The growth of indium-tin-oxide thin films on glass...

The growth of indium-tin-oxide thin films on glass substrates using DC reactive magnetron sputtering

Ho-Chul Lee, Ji-Yoon Seo, Yong-Won Choi, Dong-Wook Lee
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Volume:
72
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/j.vacuum.2003.08.001
File:
PDF, 1.12 MB
english, 2003
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