Ion deposition in a crossed E×B field system with vacuum...

Vacuum 2003 Vol. 72; Iss. 3

Ion deposition in a crossed E×B field system with vacuum arc plasma sources

I. Levchenko, M. Romanov, O. Baranov, M. Keidar
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Volume:
72
Year:
2003
Language:
english
Pages:
10
DOI:
10.1016/j.vacuum.2003.09.002
File:
PDF, 291 KB
english, 2003
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