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SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Emerging Lithographic Technologies VIII - Experimental study on basic properties of laser-produced EUV plasmas on GEKKO-XII laser facility
Shigemori, Keisuke, Nakai, Mitsuo, Shimada, Yoshinori, Yamaura, Michiteru, Hashimoto, Kazuhisa, Fujioka, Shinsuke, Nishimura, Hiroaki, Uchida, Shigeaki, Sunahara, Atsushi, Nishihara, Katsunobu, MiyanaVolume:
5374
Year:
2004
Language:
english
DOI:
10.1117/12.533918
File:
PDF, 356 KB
english, 2004