Coating deposition and surface modification under combined plasma processing
Vladimir Tereshin, Andrey Bandura, Oleg Byrka, Vladimir Chebotarev, Igor Garkusha, Oleg Shvets, Valeri TaranVolume:
73
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.vacuum.2003.12.086
File:
PDF, 293 KB
english, 2004