Rapid doping of combustion flame CVD diamonds using supersonic expanding nitrogen plasma jets
Yasutaka Ando, Takashi Saito, Shogo Tobe, Hirokazu Tahara, Kenji Fujiuchi, Takao YoshikawaVolume:
73
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.vacuum.2003.12.104
File:
PDF, 480 KB
english, 2004