Thermal stability of sputtered zirconium oxide films

Vacuum 2004 Vol. 75; Iss. 1

Thermal stability of sputtered zirconium oxide films

S. Venkataraj, O. Kappertz, Ch. Liesch, R. Detemple, R. Jayavel, M. Wuttig
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Volume:
75
Year:
2004
Language:
english
Pages:
10
DOI:
10.1016/j.vacuum.2003.12.127
File:
PDF, 353 KB
english, 2004
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