Design and implementation of a 3-D mapping system for...

Design and implementation of a 3-D mapping system for highly irregular shaped objects with application to semiconductor manufacturing

Sujan, Vivek A.
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Volume:
41
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.1474438
Date:
June, 2002
File:
PDF, 961 KB
english, 2002
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